SEMI SECS/GEM

Application
• Independently developed code, which meets the standard semi semiconductor tool communication format and semiconductor tool message format.

Competitive Advantages 
• Self-developed code standardization (modularization)
• Customized design
• Comply with the standard semiconductor tool communication format and semiconductor tool message format

Features and Specifications
• Comply with SEMI E4(SECS I), E5(SECS II), E30(GEM), E37(HSMS) communication standards
• Contains the transfer handler between host and device (RECIPE)
• Universal wet bench tool Scenario